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Tris(tert-butoxy)silanol [18166-43-3]
Tris(tert-butoxy)silanol [18166-43-3], Commercially available, Pilot scale, 99.0%min (GC), White crystalline powder.
Tris(tert-butoxy)silanol [18166-43-3] Identification
Chemical name: Tris(tert-butoxy)silanol
Synonyms: Tri-T-Butoxysilanol; TBOSOL
CAS No.: 18166-43-3
Molecular formula: C12H28O4Si
Molecular weight: 264.43
Melting point: 63-65 °C
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Tris(tert-butoxy)silanol Specification
Appearance: White crystalline powder
Purity: 99.00%min by GC
Moisture: 0.50%max by KF
Tris(tert-butoxy)silanol Package
Regular Packing: N.W 5kg/plastic tin
Sample Packing: 0.1kg-1kg/Plastic bottle
Transport Information
Non dangerous goods
HS Code: 2931900090
Tris(tert-butoxy)silanol Application:
Tris(tert-butoxy)silanol [18166-43-3] can be used as Semiconductor precursors. Tris(tert-butoxy)silanol reacted with tetrakis(dimethylamino)-hafnium vapour (Hf(N(CH3)2)4) was used for the vapour deposition of hafnium silicate glass films. Tris(tert-butoxy)silanol was used for atomic layer deposition (ALD) of highly conformal layers of amorphous silica and alumina nanolayers.
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